Rubloff group facilities
ANSLab: ALD NanoStructures Laboratory
0202 Energy Research Facility, 301 405-2933
The Rubloff group established the ANSLab in 2012-2013 as an integrated processing and characterization lab devoted primarily to nanostructures for electrical energy storage research. The focus on ALD is implemented through two Ultratech Fiji 200 thermal/plasma ALD reactors, each outfitted with multiple precursors. Sample transfer is possible between a double-wide MBraun glove box and either ALD system. One system (“Luigi”) also includes ozone capability. The other (“Mario”) provides for real-time in-situ spectroscopic ellipsometry and downstream mass spectrometry. It is UHV-transfer-linked to the glove box, Al shadow mask evaporation, Ar+ bombardment, and a new Kratos XPS system. The latter includes mono-XPS (imaging at 3-15µm resolution), UPS, SEM, SAM (scanning Auger, 100-200nm lateral resolution), ISS, and depth profiling with Ar+ or coronene. The glove box location also provides for Li shadow mask evaporation, so that the system provides for 3 mechanisms to prelithiate materials: ALD Li compounds, evaporation for contact/diffusion lithiation, and electrochemical lithiation in the glove box. Batteries (coin cells or recently moreflexible configurations) can be assembled in the glove box from current collectors and ALD or other active materials, cycled inside the glove box, and then disassembled for post-cycling surface analysis.
LAMP: Laboratory for Advanced Materials Processing
J.M. Patterson 2225, 301 405-7250
Formerly the primary lab for the Rubloff group, the LAMP lab now hosts optical/fluorescence microscopy and microfluidics capability for bioMEMS and biomaterials research, as well as ALD auxiliary to the ANSLab.