Current research directions

Nanostructures and energy applications

Nanostructure fabrication and characterization

Atomic layer deposition (ALD)

Nanomanufacturing

Past research directions

Biological microsystems and biomaterials

Vapor-phase chemical synthesis – CVD and ALD

Process and equipment simulation and simulation-based training

Semiconductor interfaces and process integration

In-situ process sensing and advanced process control

Surface and interface science

Solid state physics